The steppers in Ultratech's 1500 family are ideal for high volume manufacturing, where low capital and operating costs combine with increased throughput for high productivity.

Versatile Capabilities

The Model 1500 Wafer Stepper provides low, long-term cost of ownership benefits for high volume manufacturing requirements. Simplicity of design makes this system highly reliable, easy to operate, and easy to maintain. The Model 1500 has become the tool of choice for mature fabs manufacturing logic, power IC, communication, and nanotechnology devices.

Key Features and Benefits:

• Efficient 1X optics technology allows submicron resolution capability
• High wafer plane irradiance reduces exposure times and increases throughput, especially for thick film applications
• Low capital and operating expenses, the lowest of any new stepper, ensure significant cost of ownership benefits
• Compact system footprint increases fab space utilization and overall productivity
• Straight forward installation and operation allow quick implementation and rapid production start-up
• First class service and applications organization