Lowest cost of ownership stepper solutions for LED applications
The Sapphire 100 stepper is a production proven system for LED applications that deliver unmatched felxibility and low operating cost for an easy transistion to stepper lithography. The system combines our proprietary 1X optics technology along with market specific technology features for the LED market including:

• Unique 1X broadband optical design allows large depth of focus for rthick resist applications

The Sapphire stepper is the ideal stepper where low capital and operating costs combine with high yield volume manufacturing environments

• Non contact imaging enables transistion to leading edge PSS and current finger structures
• Large depth of focus along with proprietary hardware solutions for pulling the wafer flat enables defect free processing on warped wafers resulting in superior overlay and CD control
• Grid focus solution determines local and applies corrections during exposure providing enhanced flexibility during operations
• Proprietary MVS alignment systems and algorithm to meet market to meet market specific technology requirements
• Multiple focus and alignment algorithms have been designed specifically for addressing the challenges of smaller Sapphire and Siliconn Carbide substrates
• Quick wafer size change between 2, 3, 4, and 6-in Sapphire and SiC substrates
• Smallest footprint stepper available in the industry
• A Windows based operator workstation provides a modern touch screen, keyboard and trackball interface with integrated wizards to guide the operator thorugh standard precedures
• These features are combined with multiple wafer handling options to provide the user with a large process latitude and ease of use for high yield LED manufacturing

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