Atlas Stepper Management® software is designed to help chipmakers optimize stepper performance on the production floor. Leveraging improved programming functions and a friendly graphical user interface (GUI), Atlas plays a critical role in customizing alignment configurations and wafer layouts, and allowing easy modification of user-defined parameters.  Atlas is designed to allow chipmakers to maximize process efficiency and throughput, as well as to enhance the use of process programs in the production environment. The GUI is designed to simplify the user's ability to interpret and act upon information, offering:

• Layout of the wafer, based on chip design
• Management of reticle library and wafers
• Alignment criteria
• Focus and Exposure parameters
• Machine-related variables

Atlas is used to generate and maintain the recipe files for all Ultratech AP, Star100, NT, and Saturn/Titan/Spectrum series of steppers.

Software tools included with Atlas

• Atlas Unity Data Editor (UDE) offering the look and feel of spreadsheet entry
• Atlas Wizard for job creation following seven, easy steps
• Atlas Layout Editor for easy wafer layout modification using drag-and-drop functionality
• Graphical Alignment Editor and MVS Alignment Assistant to visually define requirements for alignment keys and targets

Latest release:
Atlas 3.5.5

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