
Atlas Stepper Management® is a Microsoft
Windows-based software program, designed to help chipmakers optimize
stepper performance on the production floor. Leveraging improved
programming functions and a friendly graphical user interface (GUI),
Atlas plays a critical role in customizing reticle configurations
and wafer layouts. The program allows easy modification of user-defined
parameters such as throughput requirements, die size, wafer size,
test pattern placement, and stepper field size. Atlas is designed
to determine the most efficient configurations possible, allowing
chipmakers to maximize process efficiency and throughput, as well
as to enhance the use of reticle and wafer data in the production
environment. The GUI is designed to simplify the user's ability
to interpret and act upon information, offering:
- Layout of the wafer, based on chip design
- Reticle layout and design
- Management of reticle library and wafers
- Alignment criteria ability
- Exposure energy
- Machine-related variables
Latest releases:
Atlas1500, version 2.1.4a
Atlas2000, version 2.1.4b
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