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Atlas Stepper Management® is a Microsoft Windows-based software program, designed to help chipmakers optimize stepper performance on the production floor. Leveraging improved programming functions and a friendly graphical user interface (GUI), Atlas plays a critical role in customizing reticle configurations and wafer layouts. The program allows easy modification of user-defined parameters such as throughput requirements, die size, wafer size, test pattern placement, and stepper field size. Atlas is designed to determine the most efficient configurations possible, allowing chipmakers to maximize process efficiency and throughput, as well as to enhance the use of reticle and wafer data in the production environment. The GUI is designed to simplify the user's ability to interpret and act upon information, offering:
  • Layout of the wafer, based on chip design
  • Reticle layout and design
  • Management of reticle library and wafers
  • Alignment criteria ability
  • Exposure energy
  • Machine-related variables

 

Latest releases:
Atlas1500, version 2.1.4a
Atlas2000, version 2.1.4b



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